260165 VO Introduction to vacuum- and surface physics (2006W)

The course "Introduction to vacuum- and surface physics" (# 804181) gives an overlook about the basic phenomena as well as the physical and technical applications of this field. We are dealing with the entire pressure range from atmospheric pressure to ultra-high and extreme vacuum (< 10-11 mbar). In particular, the topics gas-flow, vacuum pumps, adsorption and desorption processes, ionization phenomena, secondary electron emission, sputtering, as well as all aspects of vacuum measurement (gas density, gas-flow, pressure, pumping speed) are concerned. As far as possible, essential details are presented also by means of illustrative material in the lecture room as well as in a lab at Vienna University of Technology.

The primary goal of this course is to motivate and to enable the participants for the understanding of the basic phenomena and for a quick calculation and estimation of characteristic quantities such as pumping speed, pumping time, and related measurement data. A further goal is the consideration of applications in research (nuclear fusion, particle accelerators, gravity-wave detectors, surface-analytical instruments) and industry (microelectronics production, halogen lamps, optical and other coatings, hard metals, etc.).